Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Abstract This contribution deals with the analysis of positioning accuracy a new Nano Fabrication Machine. machine uses planar direct drive system and has range up to 100 mm in diameter. The was investigated different movement scenarios, including phases acceleration deceleration. Also, target position error certain movements at positions slider is considered. Currently, NFM-100 equipped tip-based measuring system. Atomic Force Microscope (AFM) self-actuating self-sensing microcantilevers, which can be used also for Field-Emission-Scanning-Probe-Lithography (FESPL). process capable fabricating structures nanometres. In combination its range, nanostructures analysed written macroscopic without any tool change. However, focus this article on measurement verified by repeated measurements. Finally, linescan, realised using both systems, shown over long motion 30 mm.